The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

M. Kawwam; Kheirreddine Lebbou

doi:10.1016/j.apsusc.2013.12.078

Journal articles

The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

M. Kawwam Kheirreddine Lebbou ¹

1 ILM - Institut Lumière Matière [Villeurbanne]

Document type :

Journal articles

Domain :

Chemical Sciences

Physics [physics]

Engineering Sciences [physics]

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https://hal-univ-lyon1.archives-ouvertes.fr/hal-02310844
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Submitted on : Thursday, October 10, 2019 - 2:44:49 PM
Last modification on : Thursday, October 15, 2020 - 8:54:03 AM

The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

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The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

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