The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

M. Kawwam; Kheirreddine Lebbou

The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

M. Kawwam Kheirreddine Lebbou ¹

1 ILM - Institut Lumière Matière [Villeurbanne]

Document type :

Journal articles

Domain :

Chemical Sciences

Physics [physics]

Engineering Sciences [physics]

Complete list of metadatas

https://hal-univ-lyon1.archives-ouvertes.fr/hal-02310844
Contributor : Depot 1 Lyon 1 <>
Submitted on : Thursday, October 10, 2019 - 2:44:49 PM
Last modification on : Friday, October 11, 2019 - 1:31:01 AM

The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

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The influence of deposition parameters on the structural quality of PLD-grown GaN/sapphire thin films

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