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Piezo-tunneling strain sensors integrated on plastic by combining vacuum thin film coatings and 3D printing technologies

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https://hal.archives-ouvertes.fr/hal-03344465
Contributor : Etienne Puyoo Connect in order to contact the contributor
Submitted on : Wednesday, September 15, 2021 - 9:44:26 AM
Last modification on : Thursday, September 16, 2021 - 3:43:42 AM

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  • HAL Id : hal-03344465, version 1

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Rémi Rafael, Etienne Puyoo, Christophe Malhaire. Piezo-tunneling strain sensors integrated on plastic by combining vacuum thin film coatings and 3D printing technologies. Microsystem Technologies, Springer Verlag, 2020. ⟨hal-03344465⟩

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